

229910052904 quartz Inorganic materials 0.000 claims description 4.229920000728 polyester Polymers 0.000 claims description 4.229910002113 barium titanate Inorganic materials 0.000 claims description 4.HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 4 HFGPZNIAWCZYJU-UHFFFAOYSA-N Lead zirconate titanate Chemical compound.()() JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims description 4 JRPBQTZRNDNNOP-UHFFFAOYSA-N Barium titanate Chemical compound.239000000463 material Substances 0.000 claims description 5.229910052451 lead zirconate titanate Inorganic materials 0.000 claims description 5.239000000969 carrier Substances 0.000 claims abstract description 49.238000004806 packaging method and process Methods 0.000 claims abstract description 50.238000004519 manufacturing process Methods 0.000 title claims description 4.Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Priority claimed from US63855904P external-priority Application filed by Askew Andy R, Lyon Gregory S filed Critical Askew Andy R Priority to JP2007548307A priority Critical patent/JP4997118B2/en Priority to EP05854138.4A priority patent/EP1831936B8/en Publication of WO2006071545A2 publication Critical patent/WO2006071545A2/en Publication of WO2006071545A3 publication Critical patent/WO2006071545A3/en Links Lyon Original Assignee Askew Andy R Lyon Gregory S Priority date (The priority date is an assumption and is not a legal conclusion. Google Patents WO2006071545A2 - Piezoelectric bimorph actuator and method of manufacturing thereof WO2006071545A2 - Piezoelectric bimorph actuator and method of manufacturing thereof
